Silicon Chemical Vapor Deposition Process Using a Half-Inch Silicon Wafer for Minimal Manufacturing System

✍ Scribed by Li, Ning; Habuka, Hitoshi; Ikeda, Shin-ichi; Hara, Shiro

• Book ID: 121500636
• Publisher: Elsevier
• Year: 2013
• Tongue: English
• Weight: 687 KB
• Volume: 46
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2013.07.059