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Silicon carbon nitride cones prepared from an ellipsoid microwave plasma chemical vapor deposition reactor

✍ Scribed by W.J. Cheng; J.C. Jiang; Y. Zhang; H.S. Zhu; D.Z. Shen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of crystalline silicon carbon

✍ Chen, L.C.; Yang, C.Y.; Bhusari, D.M.; Chen, K.H.; Lin, M.C.; Lin, J.C.; Chuang, 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 741 KB

Effect of carbon sources on silicon carb

✍ Wu, J 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 395 KB

Preparation of silicon nitride films at

✍ Kato, Isamu; Noguchi, Kazuto; Numada, Kouji 📂 Article 📅 1987 🏛 American Institute of Physics 🌐 English ⚖ 765 KB