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Silicon and germanium nanoparticle formation in an inductively coupled plasma reactor

✍ Scribed by Gorla, C. R.

Book ID: 120044588
Publisher: AVS (American Vacuum Society)
Year: 1997
Tongue: English
Weight: 740 KB
Volume: 15
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.580721

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