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Silicon accelerometer based on thermopiles

✍ Scribed by U.A. Dauderstädt; P.H.S. de Vries; R. Hiratsuka; P.M. Sarro


Book ID
103959531
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
316 KB
Volume
46
Category
Article
ISSN
0924-4247

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Infrared bolometry is demonstrated using broadband gold black absorbers positioned on micromachined AlGaAs membranes of high thermal resistance. With a cascade of \(20 \mathrm{AlGaAs}\) thermocouple, the radiation-induced temperature difference is measured. Black-body radiation in the range of \(315