Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives

✍ Scribed by Krzysztof P. Rola, Konrad Ptasiński, Adrian Zakrzewski…

• Book ID: 120914983
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 474 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-1859-z