Characterization of 45° Micromirrors Fabricated by Silicon Anisotropic Etching in Solutions Containing Different Organic Additives

✍ Scribed by Rola, Krzysztof; Ptasiński, Konrad; Zakrzewski, Adrian; Zubel, Irena

• Book ID: 123013239
• Publisher: Elsevier
• Year: 2012
• Tongue: English
• Weight: 615 KB
• Volume: 47
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2012.09.196