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Silicide formation by furnace annealing of thin Si films on large-grained Ni substrates

โœ Scribed by A. J. Brunner; E. Ma; M. -A. Nicolet


Book ID
104844123
Publisher
Springer
Year
1989
Tongue
English
Weight
350 KB
Volume
48
Category
Article
ISSN
1432-0630

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