Silicide application on gated single-crystal, polycrystalline and amorphous silicon FEAs. I. Mo silicide

✍ Scribed by Jong Duk Lee; Byung Chang Shim; Byung-Gook Park

• Book ID: 114538543
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 150 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.892182