✦ LIBER ✦
A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies
✍ Scribed by F. Cacho; S. Orain; G. Cailletaud; H. Jaouen
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 532 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0026-2714
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