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Silicidation of porous silicon and its application for the fabrication of a buried metal layer

✍ Scribed by T. Ito; A. Yamama; A. Hiraki; M. Satou


Book ID
107925717
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
418 KB
Volume
41-42
Category
Article
ISSN
0169-4332

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