Fabrication and characterization of buri
Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications
β
S. Zimmermann; Q.T. Zhao; B. Trui; M. Wiemer; C. Kaufmann; S. Mantl; V. Dudek; T
π
Article
π
2005
π
Elsevier Science
π
English
β 561 KB