Sidewall gate controlled diode for the measurement of silicon selective epitaxial growth-SiO2 interface defects

✍ Scribed by Klaasen, W.A.; Neudeck, G.W.

• Book ID: 114536259
• Publisher: IEEE
• Year: 1990
• Tongue: English
• Weight: 831 KB
• Volume: 37
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.43825