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SiCl2(X̃1A1 → Ã1B1) photo-assisted epitaxy of silicon

✍ Scribed by Ishitani, Akihiko; Ohshita, Yoshio; Takada, Toshikazu

Book ID
103165807
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
273 KB
Volume
99
Category
Article
ISSN
0022-0248

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