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SiC-Si3N4 composite coatings produced by plasma-enhanced chemical vapour deposition

✍ Scribed by J. Gerretsen; G. Kirchner; T. Kelly; V. Mernagh; R. Koekoek; L. McDonnell


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
535 KB
Volume
60
Category
Article
ISSN
0257-8972

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