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SiC nanoboulders on silicon – a nuclear reaction analysis study of low energy 13C implanted and subsequently electron beam annealed (1 0 0) silicon

✍ Scribed by A. Markwitz; V.J. Kennedy; S. Johnson; W.J. Trompetter; M. Rudolphi; H. Baumann

Book ID: 113822808
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 334 KB
Volume: 217
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.12.072

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SiC nanoboulders on silicon – a nuclear reaction analysis study of low energy 13C implanted and subsequently electron beam annealed (1&#xa0;0&#xa0;0) silicon

SiC nanoboulders on silicon – a nuclear reaction analysis study of low energy 13C implanted and subsequently electron beam annealed (1 0 0) silicon