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Si interlayer passivation on germanium MOS capacitors with high-/spl kappa/ dielectric and metal gate

✍ Scribed by Bai, W.P.; Lu, N.; Kwong, D.-L.

Book ID: 120423668
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 186 KB
Volume: 26
Category: Article
ISSN: 0741-3106
DOI: 10.1109/LED.2005.848128

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