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Si-Fluorinated Carbosilanes

✍ Scribed by Prof. Dr. Gerhard Fritz; Dipl.-Chem. Malte Berndt

Publisher
John Wiley and Sons
Year
1971
Tongue
English
Weight
212 KB
Volume
10
Category
Article
ISSN
0044-8249

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We have investigated the F incorporation and segregation in preamorphized Si during solid phase epitaxy (SPE) at different temperatures and for several implanted-F energies and fluences. The Si samples were amorphized to a depth of 550 nm by implanting Si at liquid nitrogen temperature and then enri