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Si ejection and regrowth during the initial stages of Si(001) oxidation

✍ Scribed by Cahill, David G.; Avouris, Ph.

Book ID: 118273229
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 801 KB
Volume: 60
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.106667

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