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Ab initio study of incorporation of O2 molecules into Si(001) surfaces: Oxidation by Si ejection

โœ Scribed by Yu, B.; Kim, Young; Jeon, Junjin; Kim, Hanchul; Yeom, H.; Lyo, I.; Kong, Ki-jeong; Miyamoto, Y.; Sugino, O.; Ohno, T.

Book ID
111676654
Publisher
The American Physical Society
Year
2004
Tongue
English
Weight
170 KB
Volume
70
Category
Article
ISSN
1098-0121

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## AbSbCt Collision experiments are reported for the generation and characterization of the neutral and cationic SisO, molecule. In addition to the experimental character&ion of Si202, high-level ab initio calculations ( CCSD (T ) /PVTZ//MP2/6-3 11 G (df ) ) have been performed in order to support