𝔖 Bobbio Scriptorium

✦ LIBER ✦

Shop floor control in computer-integrated manufacturing for large-scale integrated wafer fabrication systems

✍ Scribed by Takashi Torii; Yoshiki Yamamoto

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 476 KB
Volume: 3
Category: Article
ISSN: 0736-5845
DOI: 10.1016/0736-5845(87)90053-6

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

New systems for fabrication of wafer sca

New systems for fabrication of wafer scale interconnections in multichip packages : J F McDONALD, H T LIN, N MAJID, H GREUB, R PHILHOWER, S DABRAL (Center for Integrated Electron., Rensselaer Polytech. Inst., Troy, NJ, USA) 1988 Proceedings of the 38th Electronics Components Conference (88CH2600-5), Los Angeles, CA, USA, 9–11 May 1988 (New York, NY, USA: IEEE 1988), pp. 305–314

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 76 KB