✦ LIBER ✦

Shift scheduling for steppers in the semiconductor wafer fabrication process

✍ Scribed by Sooyoung Kim; Seung-Hee Yea; Bokang Kim

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Transient model of wafer temperature in

✍ Kinji Mokuya; Ikuo Matsuba; Kuniaki Matsumoto; Akira Yoshinaka 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 745 KB

Daily stepper scheduling rule in the sem

✍ Young Hoon Lee; Jeong Woo Kim 📂 Article 📅 2010 🏛 Springer 🌐 English ⚖ 636 KB

Characteristics of the transient wafer t

✍ Kinji Mokuya; Ikuo Matsuba; Takaaki Aoshima 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 556 KB

Simulation-based optimization of dispatc

✍ Huai Zhang; Zhibin Jiang; Chengtao Guo 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 362 KB

Daily planning and scheduling system for

✍ Young Hoon Lee; Myoungsoo Ham; Bruce Yoo; Jae Sun Lee 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 278 KB

Nonlinear phase shifts induced by semico

✍ Ueno, Yoshiyasu; Nakamura, Shigeru; Tajima, Kazuhito 📂 Article 📅 2002 🏛 Optical Society of America 🌐 English ⚖ 646 KB