Sheath structure for cylindrical probe in low-pressure electronegative discharges

✍ Scribed by Chung, T. H.

• Book ID: 118126379
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 310 KB
• Volume: 13
• Category: Article
• ISSN: 1070-664X
• DOI: 10.1063/1.2172934