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Shape deviations in masks for optical structures produced by electron beam lithography

✍ Scribed by A. Last; H. Hein; J. Mohr

Book ID: 106184689
Publisher: Springer-Verlag
Year: 2004
Tongue: English
Weight: 244 KB
Volume: 10
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0386-3

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