Shallow trench isolation dimensions effects on leakage current and doping concentration of advanced p–n junction diodes

✍ Scribed by A. Poyai; I. Rittaporn; E. Simoen; C. Claeys; R. Rooyackers

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 130 KB
• Volume: 114-115
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2004.07.066