Shallow trench isolation based on selective formation of oxidized porous silicon

✍ Scribed by A. Gharbi; B. Remaki; A. Halimaoui; D. Bensahel; A. Souifi

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 509 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.03.110