Shallow Sb-doped Si surface layers formed by recoil implantation

✍ Scribed by H. L. Kwok; S. C. Wong

• Book ID: 105093706
• Publisher: Springer
• Year: 1989
• Tongue: English
• Weight: 280 KB
• Volume: 24
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf01148801