Shallow PtSi-Si Schottky barrier contacts formed by a multilayer metallization technique

✍ Scribed by Tsaur, B-Y.

• Book ID: 120009847
• Publisher: American Institute of Physics
• Year: 1981
• Tongue: English
• Weight: 567 KB
• Volume: 52
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.329428