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5187. Shallow PtSi-Si Schottky barrier contacts formed by a multilayer metallization technique: B-Y Tsaur et al, J Appl Phys, 52 (8), 1981, 5243–5246


Book ID
103460154
Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
141 KB
Volume
32
Category
Article
ISSN
0042-207X

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