Shallow junction source/drain regions in CMOS/VLSI technologies

✍ Scribed by K.J. Yallup; D.J. Godfrey

Publisher: Elsevier Science
Year: 1985
Weight: 341 KB
Volume: 129
Category: Article
ISSN: 0378-4363
DOI: 10.1016/0378-4363(85)90583-2

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