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Shadow electron beam 1:1 scale printing with 0.1 ωm size elements

✍ Scribed by R.Kh. Makhmutov; S.N. Sidoruk; K.A. Valiev; L.V. Velikov; V.S. Yakunin

No coin nor oath required. For personal study only.

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Shadow electron beam 1:1 scale printing

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Electron beam lithography for fabricatio

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