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Sezawa mode SAW pressure sensors based on ZnO/Si structure

✍ Scribed by Talbi, A.; Sarry, F.; Le Brizoual, L.; Elmazria, O.; Alnot, P.

Book ID: 120649399
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 373 KB
Volume: 51
Category: Article
ISSN: 0885-3010
DOI: 10.1109/TUFFC.2004.1367481

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