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Sensor head for measurement of stress anisotropy in thin films

✍ Scribed by H. Hornauer; J. Patrikos; K. Röll


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
212 KB
Volume
41
Category
Article
ISSN
0042-207X

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The buckling method is presently one of the most commonly used methods in residual stress measurement, but still suffers from the problem that an array of structures occupying a large die area is required. In this paper, the buckling characteristics of annular thin plates were investigated and a new