Sensitivity-enhanced dry development process for VUV and EUV lithography using graft-polymerization

✍ Scribed by Taro Ogawa; Hiroaki Oizumi; Masaaki Ito; Norio Saitou

• Book ID: 103599568
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 289 KB
• Volume: 30
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(95)00247-2