Sensitivity and measurement errors of Makyoh topography

✍ Scribed by Riesz, F. ;Lukács, I. E.

• Book ID: 105363056
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 119 KB
• Volume: 202
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200460433

✦ Synopsis

Abstract

The sensitivity and measurement errors of both qualitative and quantitative (grid‐projection) Makyoh topography (MT) are analysed using analytic calculations and computer simulations. The essential difference between the two versions is pointed out. For qualitative MT, the sensitivity is defined on the analogy of the modulation transfer function, and a simple analytic expression is derived. For quantitative MT, the measurement errors are studied using numerical simulations. Two regions of imaging exists: at smooth surfaces and small screen‐to‐sample distances, the error is determined by the pixel reading error, while at less smooth surfaces and larger screen‐to‐sample distances, the errors of summation approximation dominates. The summation errors can be decreased by an iterative method. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)