Semiconductor technology: Imprints offer Moore

✍ Scribed by Pease, R. Fabian

Book ID: 109803779
Publisher: Nature Publishing Group
Year: 2002
Tongue: English
Weight: 94 KB
Volume: 417
Category: Article
ISSN: 0028-0836
DOI: 10.1038/417802a

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## Semiconductor industry offered gasket technology IntheUSA,EntegrisIncandWI Gore and Associates Inc have launched the Gore-T-wafercontainer gasket for the Entegris Crystalpak wafer-shipping container. The new system is used to protect and transport 200 mm silicon wafers used in the semiconductor