✦ LIBER ✦

Semiconductor industry offered gasket technology

Book ID: 104377613
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 639 KB
Volume: 2002
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(02)80013-7

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✦ Synopsis

Semiconductor industry offered gasket technology

IntheUSA,EntegrisIncandWI Gore and Associates Inc have launched the Gore-T-wafercontainer gasket for the Entegris Crystalpak wafer-shipping container. The new system is used to protect and transport 200 mm silicon wafers used in the semiconductor industry.

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