Semiconductor sealing material

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 145 KB
• Volume: 2002
• Category: Article
• ISSN: 1350-4789
• DOI: 10.1016/s1350-4789(02)80067-8

✦ Synopsis

A device and a method for sealing a pressure air blowing hood is described. It is capable of maintaining the seal on a hood that is provided above a sintering material charging layer, on a downward-sucking type sintering machine. The seal is made from a composite material, comprising a hard rigid body, with an elastic body installed on the skirt lower-end part of the air blowing hood so as to be in slidable contact with the surface of the wintering material charging layer.