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Semiconductor microlenses fabricated by one-step wet etching

โœ Scribed by Yu-Sik Kim; Jaehoon Kim; Joong-Seon Choe; Young-Geun Rob; Heonsu Jeon; Woo, J.C.

Book ID
119787824
Publisher
IEEE
Year
2000
Tongue
English
Weight
147 KB
Volume
12
Category
Article
ISSN
1041-1135

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Fabrication of refractive microlenses in
Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching
โœ E.M. Strzelecka; G.D. Robinson; L.A. Coldren; E.L. Hu ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 297 KB

Refractive microlenses are formed in semiconductor materials by transfer of a lens-like shape of reflowed erodable polyimide mask into the substrate by reactive ion etching. Simultaneous monitoring of the etch rates of the mask material and the semiconductor results in precise control of the lens ra