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Single-step laser fabrication of refractive microlenses in semiconductor-doped glasses

✍ Scribed by Beadie, G.; Lawandy, N. M.

Book ID
115421464
Publisher
Optical Society of America
Year
1995
Tongue
English
Weight
337 KB
Volume
20
Category
Article
ISSN
0146-9592

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Fabrication of refractive microlenses in
Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching
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Refractive microlenses are formed in semiconductor materials by transfer of a lens-like shape of reflowed erodable polyimide mask into the substrate by reactive ion etching. Simultaneous monitoring of the etch rates of the mask material and the semiconductor results in precise control of the lens ra