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Semiclassical and Quantum Transport in Si/SiO2Superlattices

✍ Scribed by M. Rosini; C. Jacoboni; S. Ossicini

Book ID
111588940
Publisher
Springer
Year
2003
Tongue
English
Weight
80 KB
Volume
2
Category
Article
ISSN
1569-8025

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Transport properties of double-gate SiO2
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✍ Prunnila, Mika ;Ahopelto, Jouni ;Sakaki, Hiroyuki πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 572 KB

## Abstract We report on fabrication and low temperature transport properties of double‐gate SiO~2~–Si–SiO~2~ quantum well with a 16.5 nm thick Si layer. The device is fabricated on a silicon‐on‐insulator substrate utilizing wafer bonding, which enables us to use heavily doped back gate. Transport