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Semi-quantitative spectrochemical analysis of silicon


Publisher
Elsevier Science
Year
1956
Tongue
English
Weight
106 KB
Volume
6
Category
Article
ISSN
0042-207X

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The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background in N(E) vs. E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samp