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SEM study of fluorocarbon films by R.F. sputtering PTFE targets on PET substrates

โœ Scribed by H.J Qi; Y.B Fu; D Wang; X.X Yang; K.Y Sui; Z.L Ma

Book ID
108422773
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
738 KB
Volume
131
Category
Article
ISSN
0257-8972

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Composite fluorocarbon/ZnO films prepare
Composite fluorocarbon/ZnO films prepared by R.F. magnetron sputtering of Zn and PTFE
โœ Yu-hui Zhang; Hong-jin Qi ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 525 KB

In this paper, composite fluorocarbon/ZnO films were prepared by R.F. sputtering used polytetrafluoroethylene (PTFE) and Zn target on polyethylene terephthalate (PET) substrate. Argon was used as the working gas and oxygen used as reacting gas. The obtained films were characterized by means of SEM,