Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

✍ Scribed by Arnab Sankar Bhattacharyya; Suman Kumari Mishra

• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 282 KB
• Volume: 41
• Category: Article
• ISSN: 0377-0486
• DOI: 10.1002/jrs.2588