EBIC study of electron generation functi
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S. Najar; B. Equer
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Article
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1994
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John Wiley and Sons
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English
โ 706 KB
The electron beam induced current technique was used to study electron energy loss in amorphous hydrogenated silicon a-Si:H. This study leads to the determination of the electron generation function which is needed when using the variable energy electron beam induced current technique (EBIC) analysi