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Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description

✍ Scribed by Czarnetzki, U.; Mussenbrock, T.; Brinkmann, R. P.

Book ID: 127145645
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 610 KB
Volume: 13
Category: Article
ISSN: 1070-664X
DOI: 10.1063/1.2397043

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