𝔖 Bobbio Scriptorium
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Self Diffusion in Intrinsic Silicon

✍ Scribed by R. F. Peart


Book ID
105386796
Publisher
John Wiley and Sons
Year
1966
Tongue
English
Weight
209 KB
Volume
15
Category
Article
ISSN
0370-1972

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Self-diffusion in silicon – Change of a
✍ Alfred Seeger πŸ“‚ Article πŸ“… 2011 πŸ› John Wiley and Sons 🌐 English βš– 128 KB

## Abstract Diffusion processes play a key role in the fabrication of semiconductor devices. For a long time the underlying mechanisms were thought to be analogous to those in metals, based on vacancies as thc dominant lattice defects in thermal equilibrium. From the mid‐sixties onwards it became c