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On the self diffusion entropy in silicon

✍ Scribed by M. Lannoo; J.C. Bourgoin

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 335 KB
Volume: 32
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(79)90797-x

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## Abstract Diffusion processes play a key role in the fabrication of semiconductor devices. For a long time the underlying mechanisms were thought to be analogous to those in metals, based on vacancies as thc dominant lattice defects in thermal equilibrium. From the mid‐sixties onwards it became c