Three-dimensional integrated coil induct
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K. S. Yeo; H. P. Tan; J. G. Ma; M. A. Do
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Article
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2001
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John Wiley and Sons
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English
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## Abstract This letter presents the results of a new 3βD highβperformance coil inductor, which was fabricated using standard 0.25 ΞΌm CMOS technology. Comparative evaluation with the conventional spiral inductor was performed in terms of quality factor (__Q__), inductance (__L__), and chip area.βΒ©