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Self-assembled Au nanoparticles in SiO[sub 2] by ion implantation and wet oxidation

โœ Scribed by Charnvanichborikarn, S.; Wong-Leung, J.; Williams, J. S.


Book ID
120082363
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
662 KB
Volume
106
Category
Article
ISSN
0021-8979

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Formation of zinc-oxide nanoparticles in
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Metal-ion implantation followed by thermal oxidation was carried out to fabricate zinc-oxide (ZnO) nanoparticles (NPs) in silica glass (SiO 2 ). A SiO 2 substrate was implanted with Zn + ions of 60 keV up to 1.0 โ€ข 10 17 ions/cm 2 . In the as-implanted state, the sample shows a strong absorption peak