Nanocavity Generation in SiO[sub 2] by Kr and Xe Ion Implantation

✍ Scribed by Assaf, H.; Ntsoenzok, E.; Leoni, E.; Barthe, M. F.; Ruault, M. O.; Kaitasov, O.; Ashok, S.

• Book ID: 127291253
• Publisher: The Electrochemical Society
• Year: 2007
• Tongue: English
• Weight: 613 KB
• Volume: 10
• Category: Article
• ISSN: 1099-0062
• DOI: 10.1149/1.2757124