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Selective Si growth on partially desorbed SiO2/Si(001) surfaces

✍ Scribed by L.H. Nguyen; C. Renard; V. Yam; F. Fossard; D. Débarre; D. Bouchier

Book ID: 108268972
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 676 KB
Volume: 44
Category: Article
ISSN: 0749-6036
DOI: 10.1016/j.spmi.2007.12.018

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